Integrated circuit package

ABSTRACT

An integrated circuit package is described that includes an integrated circuit die, a plurality of lower contact leads, and an insulating substrate positioned over the die and lower contact leads. The insulating substrate includes a plurality of electrically conducting upper routing traces formed on the bottom surface of the substrate. The traces on the bottom surface of the substrate electrically couple each lower contact lead with an associated I/O pad.

CROSS REFERENCE TO RELATED APPLICATION

This application is a Continuation of and claims priority to U.S. patentapplication Ser. No. 11/963,388, filed on Dec. 21, 2007 and entitled“Method of Packaging Integrated Circuits,” which is incorporated hereinin its entirety for all purposes.

TECHNICAL FIELD

The present invention relates generally to the packaging of integratedcircuits (ICs). More particularly, an improved method is described forpackaging IC dice.

BACKGROUND OF THE INVENTION

There are a number of conventional processes for packaging integratedcircuit (IC) dice. By way of example, many IC packages utilize ametallic leadframe that has been stamped or etched from a metal sheet toprovide electrical interconnects to external devices. The die may beelectrically connected to the leadframe by means of bonding wires,solder bumps or other suitable electrical connections. In general, thedie and portions of the leadframe are encapsulated with a moldingmaterial to protect the delicate electrical components on the activeside of the die while leaving selected portions of the leadframe exposedto facilitate electrical connection to external devices.

Increasing heat dissipation out of an IC die generally results ingreater device performance and stability. As such, it is desirable inmany applications to utilize solder bumps to electrically connect thedie to the leadframe as there is, in general, considerable more heatdissipation possible through a solder bump as compared with typicallymuch narrower and longer bonding wires. However, the use of solder bumpsto connect an IC die to a leadframe has thus far been somewhat limitedin use to packages having lower pin counts and/or leads that extendexternally from the package.

While existing arrangements and methods for packaging IC devices workwell, there are continuing efforts to both miniaturize the size of ICdevices and improve the thermal performance of IC devices.

SUMMARY OF THE INVENTION

In one aspect, an integrated circuit package is described that includesan integrated circuit die, a plurality of lower contact leads, and aninsulating substrate positioned over the die and lower contact leads.The insulating substrate includes a plurality of electrically conductingupper routing traces formed on the bottom surface of the substrate. Thetraces on the bottom surface of the substrate electrically couple eachlower contact lead with an associated I/O pad.

BRIEF DESCRIPTION OF THE DRAWINGS

For a better understanding of the invention, reference should be made tothe following detailed description taken in conjunction with theaccompanying drawings, in which:

FIG. 1 is a flow chart illustrating a process for preparing andpackaging IC dice in accordance with an embodiment of the presentinvention;

FIGS. 2A-C illustrate diagrammatic top views of a first leadframe panelsuitable for use in packaging IC dice in accordance with an embodimentof the present invention;

FIGS. 3A-C illustrate diagrammatic top views of a second leadframe panelsuitable for use in packaging IC dice in accordance with an embodimentof the present invention;

FIGS. 4A-D illustrate diagrammatic cross-sectional side views of theleadframe panels of FIGS. 2 and 3 at various steps in the process ofFIG. 1 in accordance with embodiments of the present invention;

FIG. 5A-B illustrate close-up top views of the device areas of FIGS. 2Cand 3C during packaging of an IC die in accordance with an embodiment ofthe present invention;

FIGS. 6A-B illustrate a diagrammatic cross-sectional side view and adiagrammatic bottom view of the IC package produced by the process ofFIG. 1 in accordance with an embodiment of the present invention.

FIGS. 7A-B illustrate close-up top views of alternate leadframe devicearea arrangements during packaging of an IC die in accordance withanother embodiment of the present invention;

FIGS. 8A-B illustrate close-up top views of alternate leadframe devicearea arrangements during packaging of an IC die in accordance withanother embodiment of the present invention;

FIGS. 9A-B illustrate close-up top views of alternate device areaarrangements during packaging of an IC die in accordance with anotherembodiment of the present invention.

Like reference numerals refer to corresponding parts throughout thedrawings.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

The present invention relates generally to the packaging of integratedcircuits (ICs). More particularly, an improved method is described forpackaging IC dice.

In the following description, numerous specific details are set forth toprovide a thorough understanding of the present invention. It will beapparent, however, to one skilled in the art that the present inventionmay be practiced without some or all of these specific details. In otherinstances, well known process steps have not been described in detail inorder to avoid unnecessary obscuring of the present invention.

The following description focuses on the utilization of an interconnectstructure in the packaging of IC die. The interconnect structure servesto electrically connect input/output (I/O) pads on the active surface ofthe die to associated solder pad surfaces on a leadframe, which in turnserves to electrically connect the package with a printed circuit board(PCB) or other desired substrate. In various embodiments, theinterconnect substrate may take the form of a structure substantiallysimilar to a leadframe or leadframe panel. Various embodiments of thepresent invention will be described with reference to FIGS. 1-9.

Referring initially to FIG. 1, and further in view of FIGS. 2-5, aprocess 100 of preparing and packaging IC dice in accordance withparticular embodiments of the present invention will be described.Initially, a first leadframe 200 is fabricated. With respect to FIGS.2A-C, an exemplary leadframe panel 200 suitable for use in packagingintegrated circuits according to various embodiments of the presentinvention will be described. FIG. 2A illustrates a diagrammatic top viewof a leadframe panel 200 arranged in the form of a strip. The leadframepanel 200 can be configured as a metallic structure having a number oftwo-dimensional arrays 202 of device areas. By way of example, leadframepanel 200 may be formed from copper or a suitable copper alloy. Asillustrated in the successively more detailed FIGS. 2B-C, eachtwo-dimensional array 202 includes a plurality of device areas 204, eachconfigured for use in a single IC package, and each connected by finetie bars 206.

Each device area 204 includes a number of leads 208, each supported atone end by the tie bars 206. In the illustrated embodiment, each devicearea includes twelve leads 208, three of which extend from each of foursides of a die attach area 210. Each lead 208 includes a conductivesolder pad surface 212 on the top surface of the leadframe and a packagecontact surface 214 on the bottom (back) surface of the leadframe. Theleads 208 may be etched, half-etched, or otherwise thinned relative tothe package contact surfaces, so as to provide electrical connection tocontacts on a PCB while limiting the exposed conductive areas on thebottom surface of the leadframe. Additionally, as illustrated in FIG.4A, the tie bar regions 206 (illustrated with dotted lines) aregenerally half-etched so as to reduce the amount of metal material thatmust be sacrificed during package singulation. In some embodiments, itmay also be desirable to etch or otherwise thin the top surface of theleadframe as well. An adhesive tape 216 is attached to the bottomsurface of the leadframe panel 200. The tape 216 provides structuralsupport for the leadframe features and additionally serves to supportdice positioned within the die attach areas 210 of the leadframe panel200.

A second leadframe panel 300 is also fabricated. In various embodiments,leadframe panel 300 is substantially similar to leadframe panel 200. Byway of example, with respect to FIGS. 3A-C, an exemplary leadframe panel300 suitable for use in packaging integrated circuits according tovarious embodiments of the present invention will be described. FIG. 3Aillustrates a diagrammatic top view of a leadframe panel 300 arranged inthe form of a metallic strip having a number of two-dimensional arrays302 of device areas 304, each configured for use in a single IC package,and each connected by fine tie bars 306.

Each device area 304 has substantially the same footprint as each devicearea 204 and also includes a number of leads 308, each supported at oneend by the tie bars 306. In the illustrated embodiment, each device areaincludes twelve leads 308 arranged in a similar fashion to the leads 208of leadframe panel 200. One notable difference, however, is that theleads 308 are considerably longer than the leads 208. Each lead 308includes two conductive solder pad surfaces 312 and 314 on the topsurface of the leadframe. The leads 308 may also be etched, half-etched,or otherwise thinned. By way of example, portions of the tie bars 306may be half-etched so as to limit the amount of metal material that mustbe sacrificed during package singulation. In some embodiments, leadframepanel 300 also includes an adhesive tape attached to its back surface.

It will be appreciated by those skilled in the art that, althoughspecific leadframe panels 200 and 300 have been described andillustrated, the described methods may be applied in packaging diceutilizing an extremely wide variety of other leadframe panel or stripconfigurations as well as other substrates, some of which will bedescribed in more detail below. Thus, although the following descriptionof particular embodiments describes the packaging of dice utilizingspecific leadframe technology, those of skill in the art will understandthat embodiments of the present invention may also be practiced using anextremely wide variety of leadframe and other substrate configurations.Additionally, although described with references to top and bottomsurfaces of the leadframe panels 200 and 300, it should be appreciatedthat this context is intended solely for use in describing the structureand in no way defines or limits the orientation of the leadframerelative to other package components.

In one embodiment, solder bumps 418 are formed at step 101 onto thesolder pad surfaces 312 and 314. The solder pad surfaces 312 and 314 maybe solder-bumped with any suitable means. By way of example, a solderpaste may be screen printed onto the solder pad surfaces 312 and 314. Inanother embodiment, the solder pad surfaces 312 and 314 may be fluxedand bumped with solder balls.

At 103, a multiplicity of IC dice 420 are positioned into correspondingdie attach areas 210 of the leadframe panel 200 as illustrated in FIGS.4B and 5A. Each die 420 has an active surface 422 that includes a numberof I/O pads 424. The I/O pads 424 may be the original I/O pads on theactive surface 422 of the die 420 or other I/O pads that have beenredistributed from original I/O pads using various redistributiontechniques (hereinafter, bond pads will be used interchangeably with I/Opads). Additionally, in various embodiments, underbump metallizations(UBMs) may be formed on the I/O pads 424.

In an alternate embodiment, solder bumps 418 may be formed on the I/Opads 424 (over the UBMs if present) rather than or in addition to theinner solder pad surfaces 314. Additionally, solder bumps 418 may alsobe formed on the solder pad surfaces 212 rather than or in addition tothe outer solder pad surfaces 312. However, by solder bumping theleadframe panel 300, only a single solder bumping step is required,whereas in other embodiments the leadframe panel 200 and the dice 420(presumably at the wafer level) would be solder bumped independently.

At 105, leadframe panel 300 is inverted (if necessary) and positionedover leadframe panel 200, as illustrated in FIGS. 4C and 5B. Theleadframe panel 300 is positioned such that the solder pad surfaces 312are positioned adjacent corresponding solder pad surfaces 212 and suchthat solder pad surfaces 314 are positioned adjacent corresponding I/Opads 424. Here it should be noted that in one embodiment, each solderpad surface 212 on a lead 208 is approximately coplanar with the I/Opads 424 on the active surface 422 of the die 420. At 107 the solderbumps 418 are reflowed to form solder joints 418 that physically andelectrically connect the solder pad surfaces 312 and 314 to thecorresponding solder pad surfaces 212 and the I/O pads 424 asillustrated in FIG. 4D. In this way, the leads 308 serve as routingelements that electrically couple the I/O pads 424 with associated leads208. At this point, the tape (if present) on the back surface of theleadframe panel 300 may be removed.

At 109 the solder joints 418 and portions of the dice 420 and leadframepanels 200 and 300 are encapsulated with a molding material (compound)426. The molding compound is generally a non-conductive plastic or resinhaving a low coefficient of thermal expansion. In a preferredembodiment, the entire populated leadframe panels 200 and 300 are placedin the mold and encapsulated substantially simultaneously. By way ofexample, the mold may be configured such that each two-dimensional array202 and corresponding array 302 is encapsulated as a single unit.However, it should be appreciated that a lesser number of dice 420 mayalso be encapsulated at any one time.

It should additionally be appreciated that virtually any molding systemmay be used to encapsulate the attached dice 420 and leadframe panels200 and 300. By way of example, a film assisted molding (FAM) system maybe used to encapsulate the attached dice 420. The adhesive film 216prevents molding compound intrusion over the back surfaces 428 of thedice 420 and the package contact surfaces 214 on the bottom surfaces ofthe leads 208. In some embodiments, the back surface 430 of theleadframe panel 300 is also encapsulated with molding material 426. Inother embodiments, it may be desirable to leave portions of the backsurface 430 exposed and unencapsulated with molding material 426. By wayof example, it may be desirable to leave the back surface 430 exposed toincrease the thermal dissipation out of an encapsulated die 420.

Subsequently, at 111 the molding compound 426 may be cured in a heatedoven if the molding compound is a thermosetting plastic and the tape 216may be removed. After curing the molding compound 426, the packagecontact surfaces 214 may be solder plated at 113 to facilitate contactto corresponding contact surfaces on a PCB or other substrate. In someembodiments, the back surfaces 428 of the dice are also solder plated tofacilitate external connection to the PCB.

The encapsulated leadframe panels 200 and 300 may then be singulated at115 to yield a multiplicity of individual IC packages 632, asillustrated in FIGS. 6A and B, which illustrate a diagrammaticcross-sectional side view and a bottom view, respectively, of an ICpackage 632. The encapsulated leadframe panels 200 and 300 may besingulated with any suitable means. By way of example, the leadframepanels 200 and 300 may be singulated using sawing, gang-cutting(sawing), laser cutting or plasma cutting along the tie bars 206 and 306to produce individual IC packages 632. Upon package singulation, the ICpackages 632 may inspected and/or tested before being attached to PCBsor other substrates. Those of skill in the art will recognize that thedescribed method may be used to produce a leadless leadframe package(LLP) or quad-flat-pack-no-lead (QFN) package. However, many otherpackage types, such as dual inline packages (DIPs) may be produced aswell.

The described package 632 has both improved electrical performance aswell as improved thermal performance while conforming to a desiredpackage format such as LLP or QFN. Firstly, as those familiar with theart will appreciate, the solder joints 418 have much lower resistancesthan conventional bonding wires and enable significantly more thermaldissipation. Generally, as the number and diameter of the solder jointsincrease, the current carrying and heat dissipation capabilitiesincrease. Additionally, as the diameters of the solder joints increase,the resistance through the solder joints decreases. As a result of theirlarger diameters and the relatively shorter distance traveled through asolder joint as compared to a typical bonding wire, the electricalresistance through solder ball joints is far below that of typicalbonding wires. By way of example, a typical solder ball joint may have aresistance of approximately 0.5 mΩ while a corresponding bonding wireused in a similar application may have a resistance in the range ofapproximately 60 to 100 mΩ. Furthermore, the leads 308 provide anefficient mechanism for conducting thermal energy out of the die (viasolder joints 418) and through the leads 208 (via solder joints 418)where it can be dissipated to a PCB.

The described arrangement of leadframe panels 200 and 300 are generallymost widely applicable in packaging dice 420 having a lower number ofI/O pads 424 arranged around the periphery of the active surface of thedie 420 (i.e. packages having a low pin count). In embodiments in whichthe dice to be packaged have a larger number of I/O pads arranged in agrid over the active surface of the die, such as those illustrated inFIGS. 7A-B and 8A-B, it may be desirable to utilize a microarray styleleadframe to interconnect the I/O pads with solder pad surfaces on alower leadframe having a more conventional QFN arrangement of leads.

By way of example, FIG. 7A illustrates a close-up view of a QFN-typeleadframe panel device area 704 having sixteen leads 708 arranged aroundfour sides of a die attach area and supported by tie bars 706. Asdescribed above, each lead 708 includes a solder pad surface 712 on thetop surface of the lead and a package contact surface on the bottomsurface of the lead. A die 720 that includes sixteen I/O pads 724 ispositioned within the die attach area 710. FIG. 7B illustrates a devicearea 734 from a microarray-type leadframe panel positioned over the die720 and the bottom QFN-type leadframe panel device area 704.

Each microarray device area 734 has a number of leads 736, eachsupported at one end by tie bars 738. Each lead 736 includes a long leadtrace 740 that terminates at a contact region 742 at the distal end ofthe lead (relative to the associated tie bar). Each contact region 742has a solder pad surface on the bottom surface of the contact region.Each lead 736 also includes a solder pad surface on the bottom surfaceof the lead at a more proximal region of the lead. The lead traces 740and associated contact regions 742 are arranged such that when themicroarray leadframe device area 734 is positioned over and adjacent theQFN device area 704, the contact regions 742 are positioned overcorresponding I/O pads 724. The microarray leads 736 are electricallyconnected with the die 720 and leads 708 by means of reflowing solderbumps to form solder joints between the solder pad surfaces on the leads736 and the I/O pads 724 and solder pad surfaces 712 on the die andleads 708, respectively.

One notable advantage of using such a microarray type leadframe is theability to connect the leads 708 to I/O pads 724 located within theinner region of the active surface of the die 720. This is due to theability of the lead traces 740 to extend in between neighboring contactregions 742 and other lead traces 740. Generally, as the number of I/Opads 724 increases the more difficult it becomes to reach the I/O pads724 at the inner region of the active surface of the die 720. Thus, theuse of a microarray leadframe as the top leadframe becomes moreadvantageous. By way of example, FIGS. 8A and 8B illustrate the use of atop microarray leadframe in electrically routing thirty-six I/O padsarranged in a grid pattern on a die to thirty-six corresponding leads ona bottom QFN type leadframe.

In still other embodiments, a substrate other than a leadframe may beused to electrically connect I/O pads on a die to corresponding leads ona bottom leadframe. By way of example, FIG. 9A illustrates a bottom viewof a substrate 900 having a number of conductive traces 950 on thebottom surface 952 of the substrate. The traces are generally formed ofan electrically conductive metal such as copper and may be formed by anysuitable means. By way of example, the traces 950 may be formed byetching a metallic layer that has been deposited onto the bottom surface952 of the substrate 900 or by electroplating the traces 950 onto thebottom surface of the substrate. The traces 950 are utilized as routinginterconnects that electrically couple I/O pads 924 on a die 920 withcorresponding leads 908 on a bottom leadframe. More specifically, eachtrace 950 includes an inner solder surface 954 that is electricallyconnected with an associated I/O pad 924 via an associated solder joint918, as well as a peripheral solder surface 956 that is electricallyconnected with an associated lead 908 via an associated solder joint918. Portions of the substrate 900, the die 920 and the leads 908 areencapsulated in a molding material 919.

The substrate 900 may also be formed from any suitable material. By wayof example, in one embodiment the substrate 900 is formed from a ceramicsuch as a low-temperature co-fired ceramic (LTCC). In other embodiments,the substrate 900 may be formed from various plastics, polyimides, epoxyresins, Bismaleimide-Triazine (BT) resins and/or other insultingmaterials. The substrate 900 may also be constructed as a laminatestructure having various electrically conductive interconnect routinglayers disposed in between insulating layers in a fashion similar tothat of a standard multilayer PCB.

The use of such a substrate 900 having traces 950 enables the couplingof virtually any number and arrangement of I/O pads 924 with associatedleads 908 on the bottom leadframe. More specifically, the traces 950 maybe easily and inexpensively arranged in any desired pattern to match thearrangements of the I/O pads on the die and the leads on the bottomleadframe. Additionally, the substrate 900 may be configured with vias958 that extend from various traces 950 up to the top surface 960 of thesubstrate 900. Such vias 958 facilitate the incorporation and electricalconnection of passive elements 962 such as capacitors and resistors, forexample, within the IC package as illustrated by the cross-sectionalside view of FIG. 9B. In another embodiment, a second die may even becoupled to the top surface 960 of the substrate 900 rather than or inaddition to the passive elements 962. As such, the described arrangementis particularly useful in the production of system-in-package (SIP)devices.

The foregoing description, for purposes of explanation, used specificnomenclature to provide a thorough understanding of the invention.However, it will be apparent to one skilled in the art that the specificdetails are not required in order to practice the invention. Thus, theforegoing descriptions of specific embodiments of the present inventionare presented for purposes of illustration and description. They are notintended to be exhaustive or to limit the invention to the precise formsdisclosed. It will be apparent to one of ordinary skill in the art thatmany modifications and variations are possible in view of the aboveteachings.

The embodiments were chosen and described in order to best explain theprinciples of the invention and its practical applications, to therebyenable others skilled in the art to best utilize the invention andvarious embodiments with various modifications as are suited to theparticular use contemplated. It is intended that the scope of theinvention be defined by the following claims and their equivalents.

1. An integrated circuit package, comprising: an integrated circuit die,the die having an active surface and a back surface substantiallyopposite the active surface, the active surface including a plurality ofI/O pads; a plurality of lower contact leads, each lower contact leadhaving a first solder-wettable surface and a second surfacesubstantially opposite the first solder-wettable surface; and aninsulating substrate having a plurality of electrically conducting upperrouting traces formed on a bottom surface thereof, wherein ones of thetraces have at least one inner solder-wettable portion and at least oneperipheral solder-wettable portion, each inner solder-wettable portionbeing physically and electrically connected with an associated I/O padwith an associated solder joint, each peripheral solder-wettable portionbeing physically and electrically connected with an associatedsolder-wettable surface on a lower contact lead with an associatedsolder joint such that each trace electrically couples an associated I/Opad with an associated lower contact lead.
 2. An integrated circuitpackage as recited in claim 1, wherein the substrate is formed from oneof the group consisting of a plastic, a polyimide, an epoxy resin and aBismaleimide-Triazine (BT) resin.
 3. An integrated circuit package asrecited in claim 1, wherein the substrate is formed from a ceramic. 4.An integrated circuit package as recited in claim 1, wherein thesubstrate is a laminate structure.
 5. An integrated circuit package asrecited in claim 1, further comprising a number of vias that route onesof the traces to a top surface of the substrate.
 6. An integratedcircuit package as recited in claim 1, further comprising a passivecomponent positioned on the top surface of the substrate and coupledwith each of two traces on the bottom surface of the substrate.
 7. Anintegrated circuit package as recited in claim 1, further comprising amolding material that encapsulates portions of the die, lower contactleads and the insulating substrate.
 8. An integrated circuit package asrecited in claim 1, wherein portions of the insulating substrate areexposed on an exterior of the integrated circuit package.
 9. Anintegrated circuit package as recited in claim 1, wherein the upperrouting traces are arranged into a microarray type arrangement.
 10. Anintegrated circuit package as recited in claim 9, wherein each upperrouting trace includes a trace portion connected with a contact portion,the contact portion being positioned adjacent an associated I/O pad onthe die and wherein at least one trace portion extends between contactportions of neighboring upper routing traces.
 11. An integrated circuitpackage, comprising: a first integrated circuit die, the die having anactive surface and a back surface substantially opposite the activesurface, the active surface including a plurality of I/O pads; aplurality of lower contact leads, each lower contact lead having a firstsolder-wettable surface and a second surface substantially opposite thefirst solder-wettable surface; and an insulating substrate having aplurality of electrically conducting upper routing traces formed on abottom surface thereof, the bottom surface of the insulating substratefacing and covering at least substantially the entire active face of thefirst integrated circuit die, wherein each upper routing trace includesan inner solder-wettable portion and a peripheral solder-wettableportion, each inner solder-wettable portion being physically andelectrically connected via an associated solder joint with an associatedI/O pad, each peripheral solder-wettable portion being physically andelectrically connected via an associated solder joint with an associatedsolder-wettable surface on a lower contact lead such that each upperrouting trace electrically couples an associated I/O pad with anassociated lower contact lead.
 12. An integrated circuit package asrecited in claim 11, further comprising a molding material thatsubstantially encapsulates the first integrated circuit die and at leastportions of the plurality of lower contact leads and the insulatingsubstrate, wherein each of the plurality of upper routing traces on theinsulating substrate includes a first surface and an opposing secondsurface, the second surface of the upper routing trace being in contactwith the bottom surface of the insulating substrate, at least themajority of the first surface of the upper routing trace being in directcontact with the molding material.
 13. An integrated circuit package asrecited in claim 11, further comprising a second integrated circuit diethat is mounted on a top surface of the insulating substrate thatopposes the bottom surface thereof, the second integrated circuit diebeing electrically coupled with at least one of the plurality of upperrouting traces formed on the bottom surface of the insulating substratethrough a conductive via that extends through an opening in theinsulating substrate.
 14. An integrated circuit package as recited inclaim 11, further comprising a passive element that is one of a groupconsisting of a resistor and a capacitor, the passive element beingmounted on a top surface of the insulating substrate that opposes thebottom surface thereof, the passive element being electrically coupledwith at least one of the plurality of upper routing traces formed on thebottom surface of the insulating substrate through a conductive via thatextends through an opening in the insulating substrate.
 15. Anintegrated circuit package as recited in claim 11, wherein: each of theplurality of upper routing traces includes a trace portion connected toa contact portion, the contact portion being positioned adjacent anassociated I/O pad on the first integrated circuit die; the contactportions of the plurality of upper routing traces form a grid thatincludes at least an inner row of contact portions and an outer row ofcontact portions, the inner and outer rows each including at least twocollinearally arranged contact portions, the inner row being closer tothe center of the grid then the outer row; the plurality of upperrouting traces includes a first upper routing trace, a second upperrouting trace and a third upper routing trace, the contact portion ofthe first upper routing trace being in the inner row of contactportions, the contact portions of the second and third upper routingtraces being in the outer row of contact portions; and the trace portionof the first upper routing trace extends between the contact portions ofthe second and third upper routing traces, such that the trace portionof the first upper routing trace penetrates through the outer row ofcontact portions and connects to one of the inner row of contactportions.